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Category: | Photo acid generator |
Chemical Name: | triphenylsulfonium 2,4,6-triisopropylbenzenesulfonate |
CAS NO.: | 197447-16-8 |
Molecular Formula: | C33H38O3S2 |
Molecular Weight: | 546.78 |
Application: | Photo acid generator for KrF |
Purity: | 99.5%min |
Chemical structure: