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Category: | Photo acid generator |
Chemical Name: | Triphenylsulfonium 10-Camphorsulfonate |
CAS NO.: | 227199-92-0 |
Molecular Formula: | C28H30O4S2 |
Molecular Weight: | 494.66 |
Application: | Photo acid generator for KrF |
Purity: | 99.5%min |
Chemical structure: