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Category: | Photo acid generator |
Chemical Name: | Tripenyl sulfonium bis(trifluoromethylsulfonyl)imide |
CAS NO.: | 460731-17-3 |
Molecular Formula: | C20H15F6NO4S3 |
Molecular Weight: | 545.31 |
Application: | Photo acid generator for KrF |
Purity: | 99.5%min |
Chemical structure: